SOI Technology
SOI Technology: An Opportunity for RF Designers?
FREE-DOWNLOAD [PDF] JP Raskin – 40th European Solid-State Device Research …, 2010
Substrate resistivity values higher than 1 kO cm can easily be achieved and high
resistivity silicon (HRS) is commonly foreseen as a promising substrate for radio
frequency integrated circuits (RFIC) and mixed sig- nal applications